国家/地区 韩国（13） 美国（3） 世界知识产权组织（3） 中国（2）
IPC部 B（9） C（7） G（6）
E（3） H（2）
IPC大类 B32（6） C01（5） G03（4）
B01（3） E06（3） C02（2）
G02（2） H01（2）
IPC小类 B32B（6） C01B（5） G03F（4）
E06B（3） B01J（2） C02F（2）
G02F（2）
IPC B32B009/00（4） G03F001/62（4） B32B037/00（3）
C01B032/184（3） G03F001/22（3） B32B027/06（2）
C01B032/194（2） E06B005/00（2） G03F001/64（2）
G03F007/20（2）
发明人 KIM H（14）
公开年 2014（8） 2022（3）
申请年 2012（7）  2014（2）  2022（2） 
专利权人 KOREA ELECTRONICS TECHNOLOGY INST（14）

Direct growth method of multilayer graphene through pressure heat treatment, comprises forming etch stop layer, forming metal catalyst layer, forming amorphous carbon layer and directly growing multilayer graphene on seed layer.

KIM H, KIM S K, MI K H, YOO C S, JOJINWOO, KIM H Y, JEONJUNHYUCK, YUNSUNGHO, SUNG K H, LEE S M

Performing low-temperature direct growth method of multilayer graphene for manufacturing pellicle for extreme ultraviolet lithography, involves forming etch stopper on substrate, and forming seed layer on etch stopper, where seed layer is selected from boron nitride, or boron carbon nitride.

KIM H Y, CHO J W, KIM H M, KIM S G, KIM H K, KIM H, MI K H, KIM S K

Pellicle i.e. consumable component for protecting mask from contaminants in lithography process for semiconductor or display manufacturing, has substrate whose central portion is formed with opening, and pellicle layer containing amorphous carbon and core layer, formed on support layer.

KIM H Y, CHO J W, KIM H M, KIM S G, KIM H K, KIM H, MI K H, KIM S K, JEONJUNHYUCK, LEE S M

Manufacturing graphene-metal composite pellicle containing graphene by forming metal catalyst layer on silicon substrate, forming core layer by growing graphene, forming protective layer, forming heat dissipation layer and forming pellicle frame composed of silicon substrate-metal catalyst layer.

KIM H, LEE G, KIMHYUNGKEUN

Method for manufacturing graphene, involves forming graphene layer on graphene growth substrate, and forming pattern for formation of graphene on graphene growth substrate.

KIM H K, KIM H

Functionalized graphene-based heating substrate for active-type thermo-chromic smart window, has heating element arranged between ends of electrode, where electrode is made of copper or silver.

HAN S H, KIM H, YANG W S

Laminate useful for thermochromic smart window, comprises mono or multilayered graphene layer and vanadium dioxide layer formed on one surface of the graphene layer.

KIM H, KIM Y, YANG W S

Electro-chromic device with graphene transparent electrode, used in e.g. smart window, has electrolyte layer inserted between upper abd lower graphene layers which are arranged on upper portion of upper and lower ion storage films.

CHOI D S, KIM H, YANG W S

Graphene base vanadium oxide laminate manufacturing method, involves forming lower part of graphene layer in upper portion of flexible substrate, and depositing vanadium dioxide layer on functional graphene layer.

HAN S H, KIM H, YANG W S

Manufacture of polyfunctional flexible laminate used for smart window, involves forming graphene layer and vanadium dioxide layer on upper portion of flexible substrate, and forming electrochromic layer on lower portion of substrate.

HAN S H, KIM H, YANG W S