国家/地区 中国（9）
IPC部 G（8）
IPC大类 G01（7）
IPC小类 G01P（3） G01L（2）
IPC G01P015/097（3）
发明人 FAN S（9）
公开年 2017（5） 2018（2）
申请年 2017（6） 
专利权人 UNIV BEIHANG（9）

Vacuum-encapsulated graphene resonant optical fiber pressure sensor comprises graphene film fixedly supported on blind hole of upper surface of silicon film through clamping piece, and vacuum environment for graphene film.

LI C, LIU Y, FAN S

Method for manufacturing a graphene film optical fiber Fabry Perot interferometer with photothermal stress regulation, involves sealing tail end of fiber with ceramic ferrule by epoxy resin glue to complete manufacture of resonator.

LI C, LI Z, LIU H, FAN S

Electrostatic excitation-piezoresistive detection graphene micromechanical resonator device, has electrode group for performing product summation operation of AC source and excitation source corresponding to capacitance of electrodes.

XING W, SUN L, FAN S, MA C

Graphene resonant characteristics based single-shaft acceleration meter, has first resonance beam fixed on first transmission beam, and second resonance beam absorbed on second transmission beam to form dual-end clamped beam.

FAN S, ZHU L, LI H, XING W

Method for preparing stress-controlled graphene film optical fiber Fabry-Perot resonator, involves fixing micro-operation instrument in Poly dimethyl siloxane layer, and fixing graphene film with probe base body stress controlling layer.

LI C, LAN T, YU X, FAN S, YANG J

Resonance graphene biaxial accelerometer, has substrate formed with rectangular groove, vacuum cover fixed on substrate, sensitive mass plate whose inner side is matched with groove frame to finish sealing of accelerometer body.

FAN S, DAN F, XING W

Silicon micromachined graphene cantilever resonant gyroscope, has first and second graphene resonant beam placed on transfer beam and between lever transmitting portion and frame.

FAN S, LU Y, XING W

Differential graphene resonant beam acceleration sensor, has graphene beam placed on surface of beam placing groove that is covered by insulating layers, and sensitive mass plate fixed on inner side of upper groove to seal sensor main body.

FAN S, DAN F, XING W, SHI F

Graphene dual resonant beam type pressure sensor, has first graphene resonant working beam and second graphene resonant working beam arranged on two rectangular short sides of on insulating layer to form dual-end clamped resonant beam.

FAN S, ZHAO P, XING W