| 国家/地区 | 中国(8) |
| IPC部 | C(7) H(3) |
| IPC大类 |
C01(6)
H01(3)
C23(2)
|
| IPC小类 |
C01B(6)
H01L(3)
C23C(2)
|
| IPC |
C01B031/04(3)
C01B032/184(2)
C01B032/186(2)
C23C016/26(2) |
| 发明人 |
WANG Z(8)
|
| 公开年 | 2015(5) 2017(3) |
| 申请年 |
2015(8)
|
| 专利权人 |
SHANGHAI INST MICROSYSTEM INFORMATION(8)
|
DI Z, WANG Z, WANG G, ZHENG X, DAI J, XUE Z, ZHANG M, WANG X
DI Z, WANG Z, DAI J, WANG G, ZHENG X, XUE Z, ZHANG M, WANG X
DI Z, WANG Z, DAI J, WANG G, ZHENG X, XUE Z, ZHANG M, WANG X
CAO D, CHENG X, ZHANG D, WANG Q, WANG Z, ZHENG L, YU Y, CHEN L
DI Z, XUE Z, ZHANG M, YE L, DAI J, WANG Z
CAO D, CHENG X, ZHANG D, WANG Q, WANG Z, ZHENG L, YU Y, CHEN L
DI Z, WANG G, XUE Z, ZHANG M, ZHENG X, DAI J, WANG Z
DI Z, WANG G, XUE Z, ZHANG M, ZHENG X, DAI J, WANG Z
