| 国家/地区 | 中国(12) |
| IPC部 |
C(7)
H(3)
B(2)
G(2) |
| IPC大类 |
C23(3)
H01(3)
C08(2)
G01(2) |
| IPC小类 |
C23C(3)
H01L(3)
G01L(2)
|
| IPC | C23C016/44(2) G01L001/22(2) |
| 发明人 |
XIE X(12)
|
| 公开年 | 2016(6) 2017(5) |
| 申请年 |
2016(12)
|
| 专利权人 | SHANGHAI INS.(5) UNIV EAST CH.(2) UNIV HUAZHON.(2) |
WU X, LIU S, ZHANG D, GUO C, XIE X, WU J, WANG Q
YU G, WU T, XIE X, SHI Z, CHEN J, ZHANG Y, SUI Y, CHEN Z
CHEN C, FENG Y, XIE X, YE Y, ZHOU X
WU X, LIU S, ZHANG D, GUO C, XIE X, WU J, WANG Q
WU S, XIE X, LIU X, LIU Z
CHEN J, WU T, WANG H, XIE X
HUA X, JIE X, ZHANG P, SUN J, WANG H, DING J, HAO J, XIE X
WANG H, XIE H, LI L, YANG P, XIE X, JIANG M
