| 国家/地区 | 中国(9) |
| IPC部 | C(5) H(4) |
| IPC大类 | C01(5) H01(4) |
| IPC小类 | C01B(5) H01L(4) |
| IPC |
C01B031/04(5)
H01L021/28(3)
H01L021/336(2)
H01L029/78(2) |
| 发明人 |
XIE X(9)
|
| 公开年 |
2013(9)
|
| 申请年 | 2012(5) 2013(4) |
| 专利权人 |
SHANGHAI INST MICROSYSTEM INFORMATION(9)
|
WANG H, XIE X, TANG S, WU T, XIE H, LIU X, SONG Y, SUN Q
CHEN D, DI Z, DING G, LU Z, MA J, WANG G, XIE X, ZHANG M
DING G, JIANG M, LI X, SUN J, XIE X, XU X
DING G, JIANG M, LI X, SUN J, XIE X
DING G, JIANG M, LI X, SUN J, WU T, XIE X
KANG X, LIU X, SUN Q, WANG H, XIE H, XIE X
CHEN Z, LIU X, WANG H, XIE H, XIE X, YU G, ZHANG Y
