国家/地区 日本（8） 韩国（6） 美国（6） 世界知识产权组织（5） 台湾（2）
IPC部 C（8）
IPC大类 C01（8） H01（5） B01（4）
C23（3）
IPC小类 C01B（8）
IPC C01B031/02（8）
发明人 MATSUMOTO T（7） KAGAYA M（3） MATSUMOTO TAKASHI（2）
NISHIDE D（2）
公开年 2014（3） 2013（2） 2015（2）
申请年 2014（3）  2015（3） 
专利权人 TOKYO ELECTRON LTD（8）

Forming method of base film for graphene, involves heating substrate to temperature at which impurities are eliminated as gas, and heating substrate to temperature at which crystal grains of metal are grown in metal film.

NISHIDE D, MATSUMOTO T, KAGAYA M, IFUKU R

Processing of to-be-processed material for electronic device, involves forming resist mask on graphene film of to-be-processed material and remove resist residue on graphene film by exposing to-be-processed material to oxygen radicals.

KAGAYA MUNEHITO, KAGAYA M

Graphene machining method used to prevent graphene edges from collapsing while preventing electric charges from remaining in a graphene ribbon, comprises irradiating gas cluster beam onto graphene.

MATSUMOTO T, DOBASHI K

Production of graphene for wiring film of three-dimensional stacked memory, involves decomposing carbon-containing gas with low reactivity in space which opposes substrate, and decomposing carbon-containing gas with high reactivity.

KAGAYA M, MATSUMOTO T, NISHIDE D

Manufacture of graphene e.g. carbon nanotube used for manufacturing semiconductor device, involves supplying carbon-containing gas to catalyst metal layer, heating catalyst metal layer by irradiating laser-beam and cooling.

MATSUMOTO T, IZAWA Y

Graphene patterning method for forming graphene of predetermined pattern involves bringing a patterning member in which catalyst metal layer of predetermined pattern is formed into contact with substrate having graphene oxide film.

MATSUMOTO T, KASHIWAGI Y

Processing of graphene used for manufacture of graphene nanoribbons, involves irradiating ion beam to graphene using gas cluster ion beam apparatus, forming cluster and etching.

MATSUMOTO TAKASHI, MATSUMOTO T

Pre-processing method of catalyst metal layer during formation of graphene, involves activating catalyst metal layer by applying plasma of process gas containing reducible gas and nitrogen-containing gas to catalyst metal layer.

MATSUMOTO TAKASHI, MATSUMOTO T