国家/地区 美国（4） 中国（3） 世界知识产权组织（3） 欧洲专利局（EPO）（2） 韩国（2） 台湾（2）
IPC部 C（10）
IPC大类 C23（10）
IPC小类 C23C（10） H01L（5） C01B（3）
G03F（3） B82Y（2） H05K（2）
IPC C23C016/04（10）
发明人
公开年 2022（10）
申请年 2022（5）  2020（3）  2021（2） 
专利权人

Repairing layers of laminate stack or printed circuit board, comprises providing layered structure, identifying fault location in outer graphene layer, preparing surface of outer graphene layer, and applying localized heat on fault location.

MENTOVICH E, ATIAS B, NAVEH D, LEVI A, SMOLINSKY E Z B

Processing substrates by providing semiconductor substrate, which comprises metal layer formed in dielectric layer and barrier layer between metal layer and dielectric layer, depositing graphene on exposed metal surface, depositing inhibitor layer and depositing dielectric material.

HAUSMANN D M, RAMNANI P G, SHARMA K, LEMAIRE P C, MAHOROWALA A P

Reactor assembly comprises gas inlet and one or more gas outlets and reactor chamber containing nanoporous carbon material arranged within cup and covered with cap, where first porous frit defining floor of reactor chamber arranged within cup and covered with cap, and second porous frit.

BRODEUR C L, NAGEL C J

Forming carbon-based foam with silica particles doped with boron-10 aluminum oxide (B10-Al-O) mixed in its, comprises e.g. depositing B10-Al-O compound using atomic layer deposition on silica particles in open mesh basket in vacuum chamber.

DWIVEDI V

Tantalum carbide-coated carbon material for e.g., LED manufacturing equipment, comprises a carbon substrate, and a tantalum carbide coating layer formed on the carbon substrate.

JO D W, CAO D, WAN J, CHO D W

Directly growing patterned graphite on integrated circuit chip, involves cutting ultra-thin copper foil, pressing, placing chip sample in thermal chemical vapor deposition system, dipping into copper corrosion liquid, etching lower copper through a poly(methyl methacrylate) layer and drying.

HU L, DENG J, QIAN F, XIE Y, XU C

Patterning method for manufacturing of a desired pattern of an electrically conducting, semiconducting or insulating material on a substrate,.

LEPPAENIEMI J, SNECK A

Formation of patterned layer of material involves selectively irradiating selected portion of support layer during deposition process to form layer of deposited material in pattern defined by selected portion.

PARAYIL VENUGOPALAN S, KURGANOVA E, FARAMARZI V

Manufacturing graphene of pressure sensor, comprises e.g. manufacturing sensor structure, manufacturing mask plate of each layer of sensor structure and depositing insulating layer on silicon substrate surface.

WU X, RUI L, ZHANG Q, LU J, LI Y

Formation of MXene layer on metal layer involves forming metal layer on substrate, supplying gas containing X-type compound to metal layer, and forming MXene-based layer on the metal layer.

SHIN U C