国家/地区 日本（9）
IPC部 C（9）
IPC大类 H01（9） C23（7） C01（4）
H05（3） B82（2）
IPC小类 H01J（9）
IPC C23C016/26（5） H01J037/32（5） C01B032/186（3）
C23C016/44（3） C23C016/455（3） H01L021/285（3）
H01L021/3205（3） H01L021/768（3） B82Y030/00（2）
C23C016/02（2） C23C016/04（2） C23C016/50（2）
C23C016/511（2） C23C016/52（2） H01J009/02（2）
发明人 IFUKU R（3） MATSUMOTO T（3） MURAKAMI K（2）
SUGIURA M（2） UEDA H（2） WADA M（2）
公开年 2021（9）
申请年 2020（6）  2021（2） 
专利权人 TOKYO ELECTR.（3）

Aqueous carbon material dispersion liquid for forming film, comprises carbon material, water and dispersing agent containing polymer having structural unit derived from alkylene group-containing monomer and other copolymerizable monomer.

SHIMANAKA H, KAMABAYASHI J, MURAKAMI Y, DOI S, SATO S, HIROYUKI S, JUN K, YOSHIKAZU M, SEIJI D, YUZURU S, MURAKAMI K, SATO Y

Electron-emitting element e.g. cold cathode-type electron source, has coating membrane that is film which transmits electron, and second electrode that is protective film of different material, and comprises electron emission surface.

MURAKAMI K, NAGAO M, KATSUHISA M, MASAYOSHI N

Forming layer, comprises e.g. exposing substrate to aromatic precursor in processing chamber, rinsing aromatic precursor from processing chamber, and heating substrate deposit graphene hard mask layer on substrate.

BHUYAN B J, LEONCINI A

Method for producing carbon nanotube (CNT) paste by carbon nanotube paste emitter in X-ray tube device, involves producing carbon nanotube paste, carbon nanotube powder, graphite nanoparticles, dispersing agent and distilled water are mixed.

LEE C J, GO H B, LEE S H, GO H, HUN L S

Formation of film involves preparing substrate containing conductive film formed on base substrate, forming composite layer containing graphene layer, and electrically connecting conductive film with former film through composite layer.

NI Z, MATSUMOTO T, IFUKU R, YOU W

Film forming by cleaning interior of treatment container, extracting and removing oxygen inside treatment container, introducing substrate into treatment container, and forming carbon film on substrate by plasma chemical vapor deposition.

MAKOTO W, TAKASHI M, NOBUTAKE K, RYOTA I, MASAHITO S, HIROKAZU U, MATSUMOTO T, KABURAGI N, IFUKU R, SUGIURA M, UEDA H, WADA M, KABUKI N

Depositing graphene on a metal surface of substrate by providing substrate including metal surface in reaction chamber, flowing hydrocarbon precursors into reaction chamber and toward the substrate, and generating radicals of hydrogen.

VARADARAJAN B N, NARKEVICIUTE I

Processing device for forming film, consists of processing container having thermal sprayed ceramic coating on inner wall, mounting table for holding substrate and control unit for performing precoating and film forming.

WADA M, MATSUMOTO T, SUGIURA M, IFUKU R, UEDA H, KURYOTA L

Ion generation composite target used for ion irradiation technology in laser-driven ion acceleration apparatus contains substrate having through hole formed on it and graphene thin film configured on the substrate, across the hole with specified thickness and ionized to release proton or carbon ion.

WOON W, YASUHIRO K, WOON W Y