国家/地区 中国（11） 美国（8） 世界知识产权组织（6） 欧洲专利局（EPO）（4） 韩国（4） 日本（3） 德国（2） 台湾（2）
IPC部 C（15）
IPC大类 C23（15） H01（9） C01（6）
B01（2） B82（2） C09（2）
C30（2）
IPC小类 C23C（15） H01L（6） C01B（5）
H01M（3） B01J（2） B82Y（2）
C01G（2） C30B（2）
IPC C23C016/40（15）
发明人 NARKEVICIUTE I（2） SHARMA K（2） VARADARAJAN B N（2）
WAN G（2） WANG G（2）
公开年 2021（15）
申请年 2021（13） 
专利权人 LAM RES CORP（2） UNIV HAINAN（2）

Selective deposition on dielectric layer comprises providing semiconductor substrate, selectively depositing graphene on exposed metal surface of metal layer of substrate, and selective depositing dielectrically-deposited material on layer.

NARKEVICIUTE I, VARADARAJAN B N, SHARMA K, NARKEBICHUDDER I

Preparing two-dimensional compound semiconductor thin film useful in micro-nano electronic device, comprises placing insulating substrate with single-layer two-dimensional layered material/metal oxide film vertical heterostructure on surface in heating device, and introducing carrier gas.

SHI Z, ZHANG C, ZHU H, WU T, GAO B

Structure e.g. porous metal-coated structure used for e.g. catalytic application, comprises substrate comprising activated adsorbent material, and metal material deposited on substrate.

PEPIN P, ETHRIDGE K, THOMSON C, HOLBROOK B, ESRIDGE K

Porous silicon-carbon composite material for lithium ion battery, comprises core-shell structure, where inner core is composite of porous carbon, cerium dioxide and graphene component, and shell is doped with oxide compound selected from phosphorus oxide, arsenic oxide and selenium oxide.

CAO J

Vapor deposition process for selectively depositing material on a first surface of substrate relative to a second organic surface for semiconductor device, comprises contacting the substrate cyclically with a vapor phase hydrophobic first reactant and a vapor phase second reactant.

TOIS E, HAUKKA S P, NISKANEN A, MATERO R H, SUEMORI H, FAERM E

Method for production of atomic bilayer nanotape, involves oxidizing portion of monolayer to provide oxidized portion, and removing oxidized portion to provide atomic layer nanotape comprising transition metal dichalcogenide material.

HARUTYUNYAN A R, LI X

Anti-fouling coating for use in e.g. optical instrument, has coating layer formed on substrate, where coating layer is made of indium tin oxide, and dielectric layer formed between coating layer and substrate.

WILKEN R, SPECHT U, LUKASCZYK T

Directly growing graphene thin film on surface of non-metallic substrate, involves depositing aluminum oxide film on surface of substrate, evaporating copper film on surface of substrate deposited with aluminum oxide film, annealing and growing graphene by chemical vapor deposition.

LOU G, OUYANG Y, WANG W, LIU Z

Encapsulating graphene in semiconductor substrate, comprises selectively depositing graphene on metal layer, depositing metal oxide over graphene by thermal-based deposition technique, and depositing hermetic barrier over metal oxide.

VARADARAJAN B N, NARKEVICIUTE I, SHARMA K

Applying functional compound on sulfur particles for forming treated sulfur particles, involves using coating composition containing inorganic electroconductive compound, electroconductive carbon compound and organic precursor compound.

HAVERMANS D, SALLARD S, SHAFIQUE A, VANGENEUGDEN D, VANHULSEL A, HARDY A, SALAH S, SHAFIK A, VAN GENUGDEN D, HARDY N