国家/地区 世界知识产权组织（31）
IPC部 C（31）
IPC大类 C23（31）
IPC小类 C23C（31） H01L（26） C01B（22）
B82Y（11） C30B（8） H01J（5）
B32B（4） H01B（4） B01J（3）
H01M（3） B05D（2） C01G（2）
C08L（2） H05H（2）
IPC C23C016/02（31）
发明人 BINDER A（2） CHUA T C（2） DIXON S（2）
GUINEY I（2） IFUKU R（2） MATSUMOTO T（2）
MEBARKI B（2） NARKEVICIUTE I（2） SUGIURA M（2）
VARADARAJAN B N（2） WEBER N（2） ZHANG Y（2）
公开年 2021（6） 2022（5） 2013（4） 2023（4） 2017（3） 2012（2） 2015（2）
申请年 2022（6）  2021（5）  2013（4）  2020（4）  2017（3）  2012（2）  2014（2）  2016（2） 
专利权人 APPLIED MATE.（2） BASF SE（2） LAM RES CORP（2） PARAGRAF LTD（2）
TOKYO ELECTR.（2） UNIV CALIFOR.（2） UNIV XIDIAN（2）

Plasma deposition of material onto two dimensional layer of first substrate, involves depositing protective layer directly onto dimensional layer by pulsed plasma deposition process, and depositing second layer onto protective layer by second plasma deposition process.

RIAZIMEHR S, KNOOPS H, SUNDARAM R

Depositing graphene or graphene oxide onto substrate from gaseous source of carbon precursor involves using plasma-enhanced chemical vapor deposition method, where carbon precursor consists of ethylene and the process is carried out in absence of carrier gas.

JOUIAD M, EL MARSSI M, LEJEUNE M

Growing graphene layer structure on substrate used in opto-electronic device, e.g., solar cell, solar cell, light-emitting diode, organic light-emitting diode, electro-optic modulator, photodetector or diode, involves providing substrate on susceptor in chemical vapor deposition reaction chamber.

THOMAS S, GUINEY I, DIXON S

Formation of graphene layer for semiconductor device, involves exposing substrate comprising conductive and dielectric materials to plasma to clean conductive material, and exposing substrate to another plasma to form graphene layer.

MEBARKI B, CHUA T C, VALENCIA C W, LEE J J, TANG X, CHEN X

Wafer used to chemical vapor deposition growth of uniform graphene comprises planar silicon substrate, insulating layer provided across silicon substrate, and barrier layer provided across the insulating layer.

DIXON S, KAINTH J, JAGT R, GUINEY I, BADCOCK T J

Lithium or sodium-based battery used for e.g. portable electronic device, comprises anode at least partially covered on its side facing electrolyte by at least one artificial solid-electrolyte interphase layer with layer(s) of porous graphene with pores having preset average characteristic width.

CHOI K, HEIGHT M J

Depositing graphene layer on substrate in plasma enhanced chemical vapor deposition of graphene at low temperatures, involves providing substrate within modular microwave plasma chamber, and flowing carbon source and hydrogen source into modular microwave plasma chamber.

KRAUS P A, NGUYEN H, MEBARKI B, WANG C, VALENCIA C, CHUA T C

Manufacture of steel strip for battery case, involves performing continuous roll-to-roll process by joining leading edge of coil of nickel-plated steel strip to trailing edge of preceding coil of nickel-plated steel strip in joining section.

WITTEBROOD A J

Substrate for forming semiconductor device, comprises graphene layer arranged on silicon surface of silicon carbide crystal substrate, epitaxial growth layer, and graphene layer arranged on silicon surface of epitaxial growth layer.

NORIYUKI M, TAKUJI M, MITSURU M, TAKAYASU O

Carrier substrate for transferring transfer layer from carrier substrate to product substrate, comprises carrier base substrate, protective layer, and transfer layer grown on protective layer.

BURGGRAF J, JUERGEN B