国家/地区 中国（8） 世界知识产权组织（4） 台湾（2） 美国（2）
IPC部 C（13） H（3） B（2）
IPC大类 C23（13）
IPC小类 C23C（13） C01B（6） H01J（2）
H01L（2）
IPC C23C016/54（13）
发明人 QU Y（2） SHEN D（2） TAN H（2）
WANG W（2）
公开年 2022（13）
申请年 2021（8）  2022（5） 
专利权人 APPLIED MATE.（2） BEIJING TECH.（2）

Mechanical hand for film continuous graphene film continuous scale deposition device, has screw rod whose end is installed on driving device, and push rod slidably mounted on screw rod along length direction of screw rod.

XIE S

Twin-chamber roll-to-roll graphene film manufacturing device useful for transparent display and flexible display having upper chamber with supply roller for supply catalytic metal film and winding roller for winding catalytic metal film.

KI K Y

Enhanced graphene film coating device based on plasma chemical vapor deposition (PECVD), has concave lantern ring supporting rod whose upper portion is provided with pushing plate, and bidirectional transmission screw rod whose end is provided.

DENG Z, TANG W, HUANG X, BAI J, SHI Y, LI B

Segmented roll-to-roll chemical vapor deposition graphene continuous growth device, has exhaust pipe whose end is provided with vacuum pump, and unwinding cabin and reeling cabin whose ends are wound on unreeling drum and winding drum.

PAN D, QU Y, TAN H, WANG W, SHEN D

Gas phase deposition furnace for graphene chemical processing, has main body whose upper end is fixedly connected with exhaust device, where right part of outer surface of main body is connected with discharging pipe.

YANG K, CHEN W

Depositing graphene layer on substrate in plasma enhanced chemical vapor deposition of graphene at low temperatures, involves providing substrate within modular microwave plasma chamber, and flowing carbon source and hydrogen source into modular microwave plasma chamber.

KRAUS P A, NGUYEN H, MEBARKI B, WANG C, VALENCIA C, CHUA T C

Manufacture of steel strip for battery case, involves performing continuous roll-to-roll process by joining leading edge of coil of nickel-plated steel strip to trailing edge of preceding coil of nickel-plated steel strip in joining section.

WITTEBROOD A J

Processing semiconductor by generating plasma of carbon- and hydrogen-containing precursors, forming layer of graphene on substrate, and halting flow of carbon-containing precursor while maintaining plasma with hydrogen-containing precursor.

INGLE N K, MALLICK A B, SINGHA R S, WANG J, ROY S S

Continuous chemical vapor deposition thin film manufacturing device comprises sample introducing cabin, heating cabin, process chamber and cooling chamber.

QU Y, TAN H, SHEN D, WANG W

Continuous preparation method of three-dimensional in situ graphene reinforced metal base composite material used in aerospace and automobile , involves conveying stacked multi-layer graphene foam metal strip.

SHI P, SHEN Z, LIN Z, ZHONG Y