国家/地区 中国（13）
IPC部 C（13）
IPC大类 C23（13）
IPC小类 C23C（13） H01L（3） B32B（2）
H01J（2）
IPC C23C014/06（13）
发明人 LIU Y（2） XU H（2）
公开年 2020（6） 2021（6）
申请年 2020（13）
专利权人 EV GROUP THA.（2） QINGDAO CANY.（2）

Semiconductor component useful in plasma reaction device and plasma etching process of process gas e.g. carbon tetrafluoride and oxygen, comprises conductive heat conducting material filled in pores of first corrosion resistant coating.

NI T, CHEN X, ZHU S

Carrier substrate for transferring transfer layer from carrier substrate to product substrate, comprises carrier base substrate, protective layer, and transfer layer grown on protective layer.

BURGGRAF J, JUERGEN B

Method for transmitting a transmission layer from a substrate, such as graphene layer, to a carrier substrate, such as glass substrate and ceramic substrate, involves transmitting a graphene layer from substrate to carrier substrate.

MOKKAPATI V R, POVAZAY B, UHRMANN T, ULLMANN T, MOKKAPATI V R S S, SARMA M V R, THOMAS A

Tribological system useful for e.g. rotor bearings in wind turbines, comprises base body and sandwich lubrication having binder-free solid lubricant layer including solid lubricant and lubricant layer with lubricant.

SCHWEIGKOFLER M, VENGUDUSAMY B, SEEMEYER S, LODERER D

Using deposition system involves loading wafer into processing chamber equipped with RF system, supplying aromatic hydrocarbon precursor into processing chamber, turning on RF power of RF system to decompose aromatic hydrocarbon precursor into active radicals.

WU C, NI I, HSU Y, HUANG J, XU Y, WU Z

Article used for a fuel cell coated with a coating, comprises a base and a coating is applied on the surface, the coating includes a corrosion resistant layer and onto which an external layer is applied which has conductive characteristics.

SUN H, NAVABPOUR P

Ultra-thin composite adhesive film comprises graphene heat dissipation layer, substrate layer, first metal layer and colloid layer stacked in sequence, second metal located between graphene heat dissipation layer and substrate layer.

LI L, LIANG C

Graphene/titanium nitride-silver composite material comprises two-dimensional structure array template formed on a silicon wafer using polylactic acid microspheres arranged and titanium nitride-silver layers and graphene layers.

GAO X

Preparing graphene using amorphous carbon at low temperature comprises e.g. taking magnetic metal of nickel, iron or cobalt in vacuum cavity, setting electromagnet and forming plasma atmosphere restricted by closed magnetic field.

WU Y, YU S, LIU Y, GAO J, HEI H, ZHOU B, MA Y

Preparing graphene-based transparent flexible conductive film layer involves growing a graphene bottom layer on the surface of an insulating substrate and depositing a flexible transparent metal conductive film.

SUI X