国家/地区 美国（22）
IPC部 C（22） H（13） B（6）
G（3）
IPC大类 C01（22） C23（13） H01（13）
B82（3） C30（3） B01（2）
G01（2）
IPC小类 C01B（22）
IPC C01B032/186（22）
发明人 LEE C（3） SHIN H（3） BYUN K（2）
LEE C S（2） LEE E（2） SHIN H J（2）
SHIN K（2） YEH N（2）
公开年 2022（11） 2021（10）
申请年 2021（22）
专利权人 SAMSUNG ELEC.（3） APPLIED MATE.（2） CALIFORNIA I.（2） UNIV SUNGKYU.（2）

Method of forming nano crystalline graphene, involves arranging substrate having pattern in reaction chamber, injecting reaction gas into reaction chamber, reaction gas including carbon source gas, inert gas, and hydrogen gas that are mixed, generating plasma of reaction gas in reaction chamber.

LEE C, JUNG A, SHIN H, SHIN K, SHIN K W, SHIN H J, JUNG A R, LEE C S

Growing graphene nanoribbon involves depositing aromatic molecular seeds from gas phase onto surface of growth substrate, and growing graphene nanoribbon from aromatic molecular seeds via chemical vapor deposition, where growth substrate is germanium substrate.

JACOBBERGER R M, WAY A J, ARNOLD M S

Preparing patterned graphene, comprises forming accommodating passage in silicon carbide base, providing catalyst and insulating substrate, placing catalyst in accommodating passage, and placing sandwich structure in heating device.

GAO B, ZHANG C, GU J, WU T, ZHU H

Strain engineered material for valley splitter device, comprises graphene sheet having array of wrinkles induced by deformations in graphene sheet, where deformations are formed by lattice of underlying nanostructures on substrate, periodically varying field distribution has field magnitude minima.

TEAGUE M L, WANG J, HSU C, YEH N

Depositing graphene layer on substrate in plasma enhanced chemical vapor deposition of graphene at low temperatures, involves providing substrate within modular microwave plasma chamber, and flowing carbon source and hydrogen source into modular microwave plasma chamber.

KRAUS P A, NGUYEN H, MEBARKI B, WANG C, VALENCIA C, CHUA T C

Multilayer electrically conductive wire for use in aeronautics field to lighten airplane, has central support core, set of pairs of layers around central support core comprising intercalary layer made of non-carbon based material and graphene layer, and first layer arranged on outer surface.

LEKARSKI K

Creating nanopore on membrane, fabricating nanopores on membrane for use in two-dimensional membrane, involves fabricating mask with nano-tunnel, placing mask over membrane, bombarding mask with ions, and bombarding membrane with ions passing through nanotunnel.

SHAO L

Forming graphene on flexible substrate, involves providing polymer substrate including metal structure, carbon source and carrier gas, and subjecting polymer substrate to plasma enhanced chemical vapor deposition process.

TSENG C, LIN C, YEH N, LEU C, LU C

Forming graphene on silicon substrate for electronic device, comprises providing silicon wafer having growth surface free of native oxides in reaction chamber, and nitriding growth surface with nitrogen-containing gas with wafer.

DIXON S, GUINEY I, THOMAS S, THOMAS S C S

Forming graphene film involves depositing carbon source onto substrate within deposition environment comprising vacuum to form graphene film on substrate, where carbon source comprises coal, coal component, or combination.

LAUMB J, TIBBETTS J, AZENKENG A