国家/地区 美国（12） 韩国（10） 中国（6） 世界知识产权组织（4） 日本（2）
IPC部 C（23）
IPC大类 C01（23）
IPC小类 C01B（23）
IPC C23C016/26（18） C01B032/186（14） C23C016/02（8）
H01L021/02（8） H01L021/285（5） B82Y040/00（4）
C23C016/56（4） H01L021/768（4） H01L023/532（4）
B82Y030/00（3） C01B032/184（3） C01B032/194（3）
C23C016/01（3） C23C016/455（3） C23C016/505（3）
发明人 LEE C S（4） LEE C（3） SHIN K（3）
SHIN K W（3） BYUN K（2） BYUN K E（2）
ELSAYED K A M（2） KIM K（2） MAAROUF A A（2）
SHIN H（2） SHIN H J（2） ZHANG L（2）
公开年 2023（23）
申请年 2022（14）  2021（7）  2023（2） 
专利权人 SAMSUNG ELEC.（4） UNIV IMAM AB.（2）

Hard mask film used in etching process for manufacturing semiconductor device, comprises first graphene layer, first amorphous carbon layer on first graphene layer, second graphene layer on first amorphous carbon layer, and second amorphous carbon layer on second graphene layer.

KIM Y, OH S, AN S, AHN S J, OH S R, KIM Y U, AN X

Battery-powered analyte sensing system used in Three-dimensional (3D) printing techniques, comprises printed battery comprising anode, comprises non-toxic biocompatible metal, first carbon-based current collector in electrical contact with anode and 3D hierarchical mesoporous carbon-based cathode.

CHMIOLA J, SINGH S, LIM S H, COOK D, MONTALVO C, STOWELL M W, LANNING B

Cathode active materials useful for secondary batteries, comprises carbon-based base material, silicon layer formed on carbon-based base material, and graphene provided on outside of silicon layer.

CHAE S

Graphene processing device for providing low energy injection ion for use in e.g. biological medicine application, has upper electrode net and the lower electrode net through which plasma generated by plasma coil discharge passes so as to process sample located on sample seat in processing chamber.

WANG W, JIANG C, WANG Y, WANG H

Depositing graphene or graphene oxide onto substrate from gaseous source of carbon precursor involves using plasma-enhanced chemical vapor deposition method, where carbon precursor consists of ethylene and the process is carried out in absence of carrier gas.

JOUIAD M, EL MARSSI M, LEJEUNE M

Flexible graphene thin film used for transparent electrode devices, comprises flexible substrate, titanium buffer layer grown on one side of flexible substrate by sputtering and graphene thin film layer grown in-situ in same equipment.

YOON S G, IREH H

Graphene interconnect structure useful for electronic device comprises first oxide dielectric layer including porous silicon oxide, or amorphous boron nitride, second oxide dielectric layer including aluminum oxide and graphene layer.

KIM C, BYUN K E, SHIN K W, LEE C S, BAEKWON P, PARK B, LEE C, SHIN K, BYUN K

Graphene carbide/silicon carbide composite material used in electromagnetic shielding device, comprises multiple graphene of silicon carbide crystal grains uniformly distributed to form thin film.

LI Z, ZHANG L, TU R, XU Q, ZHANG S

Improving quality of metal catalytic thin layer prepared by sputtering comprises cleaning Si/SiO2 substrate, photoetching the pattern, sputtering a layer of metal thin layer with the graphene of catalyzing and growing on the substrate sheet by using the sputtering table, peeling and etching.

ZHAO Y, YU X, LIU Z, NIE X, SONG Z, DENG J, HE X

Preparing a sponge nickel-loaded nitrogen and fluorine double-doped vertical graphene useful in e.g. preparing anode and cathode materials for lithium-sulfur batteries, comprises e.g. obtaining Ni(AC)2 aqueous solution, adding N2H4H2O and mixing to obtain reaction solution.

TU J, WANG X, QIU Z, XIA X