国家/地区 |
中国(13)![]() |
IPC部 |
C(13)![]() |
IPC大类 |
C30(13)
H01(12)
C23(5)
C01(3) H05(2) |
IPC小类 |
C30B(13)![]() |
IPC |
H01L021/02(9)
C30B025/18(8)
C30B029/40(6)
C30B029/02(3) C30B033/12(3) C23C014/06(2) C23C014/35(2) C23C016/26(2) C30B025/16(2) H01L029/20(2) H01L033/00(2) |
发明人 |
BEN J(2)
CHEN Y(2)
JIANG K(2)
LI D(2) SUN X(2) ZHANG S(2) |
公开年 | 2022(7) 2023(6) |
申请年 |
2022(13)![]() |
专利权人 | CHANGCHUN IN.(2) |
LI D, JIANG K, BEN J, ZHANG S, CHEN Y, LYU B, SUN X
ZHAO Y, YU X, LIU Z, NIE X, SONG Z, DENG J, HE X
WANG J, WANG X, TANG X, CAO H, BAI W
WANG E, YUE X, HUANG Z, HE M, ZHANG Z, DING Z
TSUJIMOTO H, KOBUNE T, LI L, LEE L, KOBUNEDAKAKI