国家/地区 |
中国(16)![]() |
IPC部 |
B(16)![]() |
IPC大类 |
C23(16)
C01(9)
B82(7)
B32(4) B01(3) B22(3) H01(3) B81(2) G01(2) |
IPC小类 |
C23C(16)
C01B(9)
B82Y(7)
B32B(4) B22F(3) B01D(2) B01J(2) G01N(2) H01L(2) |
IPC |
C23C016/26(16)![]() |
发明人 | SHI H(2) YANG X(2) |
公开年 |
2017(16)![]() |
申请年 | 2016(9) 2017(7) |
专利权人 | CHINESE ACAD.(2) |
WANG H, CHEN L, HE L, XIE H, WANG X, XIE X
PARK H G, HEIGHT M, CHOI K, PARK H
HARUTYUNYAN A, HARUTYUJAN A
SHIVAREDDY S, BOHM S, PATOLE S, THAKUR D B, VAN DER WEIJDE D H, BOEHM S
FENG S, SHI H, LI C, ZHU X
LUTZ T, PURKL F, ROELVER R, ROHLFING F
MI R, FU Z, WANG C, HUANG W, ZHONG M, LIU M, LI H, YUAN L, YANG X, ZHAO H
YANG L, CHEN Z, XU X, SHU W, ZHANG J, YIN L, WU H, LI Q, BECK T J