国家/地区 中国（18） 美国（15） 韩国（9） 世界知识产权组织（6） 日本（2）
IPC部 C（37） H（22） B（12）
A（2） G（2）
IPC大类 C23（37） H01（21） C01（16）
B82（6） B22（4） C09（3）
C25（3） A61（2） B01（2）
B33（2） C08（2） G01（2）
IPC小类 C23C（37）
IPC C23C016/26（37）
发明人 LEE C S（3） LI J（3） AHN S J（2）
AN S（2） BYUN K（2） BYUN K E（2）
ELSAYED K A M（2） IFUKU R（2） LEE C（2）
MA Y（2） MAAROUF A A（2） MATSUMOTO T（2）
OH S（2） OH S R（2） SHARMA K（2）
公开年 2023（37）
申请年 2022（37）
专利权人 SAMSUNG ELEC.（4） APPLIED MATE.（2） LAM RES CORP（2） SUZHOU SHENG.（2）
TOKYO ELECTR.（2） UNIV IMAM AB.（2）

Forming graphene involves pretreating surface for processing using one or more pretreating flowrates of substrate gas scavenging gas composition or annealing gas composition, in presence of one or more pretreating temperatures, to produce contaminant-depleted surface.

PHILPOTT R, BARAKET M, SHERRILL V

Hard mask film used in etching process for manufacturing semiconductor device, comprises first graphene layer, first amorphous carbon layer on first graphene layer, second graphene layer on first amorphous carbon layer, and second amorphous carbon layer on second graphene layer.

KIM Y, OH S, AN S, AHN S J, OH S R, KIM Y U, AN X

Depositing graphene or graphene oxide onto substrate from gaseous source of carbon precursor involves using plasma-enhanced chemical vapor deposition method, where carbon precursor consists of ethylene and the process is carried out in absence of carrier gas.

JOUIAD M, EL MARSSI M, LEJEUNE M

Preparing secondary enhanced graphene gas gel useful in shoes, comprises introducing substrate layer on prepared graphene gas gel surface, performing chemical vapor deposition reaction and growing sheet layer or spherical graphene aggregate on surface of substrate layer.

ZHENG L, SHEN Y, ZHENG Y, WU L, WANG H

Graphene-coated electrode material preparation system comprises inner part of outer wall of bottom beam provided with reciprocating component, inner part of top plate and bottom plate of reciprocating component provided with vibration component, and box body respectively provided with heating plate.

WANG Y

Improving tribological property of titanium substrate through electrophoretic deposition involves using titanium substrate that is pure titanium substrate, coating pure titanium substrate with graphene nanoplatelets at deposition parameters, and annealing, where pure titanium substrate is cathode.

MALLICK M, ARUNACHALAM N

Preparation of additive used for preparing copper or copper alloy profile, involves coating graphene on raw material of copper or copper alloy powder surface, and performing high-energy beam additive manufacturing using obtained graphene modified copper or copper alloy powder.

LIU B, HOU H, LI T

Preparing gallium nitride nanowire/graphene composite material useful in sterilizing device, comprises providing substrate, forming layer of gold film on positive and negative surfaces of substrate, growing gallium nitride nanowire on substrate covered with gold film, and depositing graphene film.

LI J, FU Y, DAI Y, LIN C, WANG Z, LIN L, YANG Y, HU Y, XU Z, FU Z

Graphene carbide/silicon carbide composite material used in electromagnetic shielding device, comprises multiple graphene of silicon carbide crystal grains uniformly distributed to form thin film.

LI Z, ZHANG L, TU R, XU Q, ZHANG S

Improving quality of metal catalytic thin layer prepared by sputtering comprises cleaning Si/SiO2 substrate, photoetching the pattern, sputtering a layer of metal thin layer with the graphene of catalyzing and growing on the substrate sheet by using the sputtering table, peeling and etching.

ZHAO Y, YU X, LIU Z, NIE X, SONG Z, DENG J, HE X