| 国家/地区 | 中国(10) |
| IPC部 | C(9) H(3) |
| IPC大类 |
C01(7)
H01(3)
C23(2)
|
| IPC小类 |
C01B(7)
H01L(3)
C23C(2)
|
| IPC |
C01B031/04(4)
C01B032/186(4)
C23C016/26(2)
|
| 发明人 |
DAI J(10)
|
| 公开年 | 2015(5) 2017(3) |
| 申请年 | 2015(8) 2014(2) |
| 专利权人 |
SHANGHAI INST MICROSYSTEM INFORMATION(10)
|
DI Z, WANG Z, WANG G, ZHENG X, DAI J, XUE Z, ZHANG M, WANG X
DI Z, WANG Z, DAI J, WANG G, ZHENG X, XUE Z, ZHANG M, WANG X
DI Z, WANG Z, DAI J, WANG G, ZHENG X, XUE Z, ZHANG M, WANG X
DI Z, CHEN D, DING G, GUO Q, MA J, WANG G, XIE X, XUE Z, ZHANG M, ZHENG X, DAI J
DI Z, XUE Z, ZHANG M, YE L, DAI J, WANG Z
DI Z, JIA P, WANG G, XUE Z, ZHANG M, ZHENG X, DAI J
DI Z, WANG G, XUE Z, ZHANG M, ZHENG X, DAI J, WANG Z
DI Z, WANG G, XUE Z, ZHANG M, ZHENG X, DAI J, WANG Z
DI Z, WANG G, SHI X, XUE Z, ZHANG M, ZHENG X, DAI J
DI Z, WANG G, XUE Z, ZHANG M, ZHENG X, DAI J, WANG Z
