| 国家/地区 | 韩国(9) 美国(6) 中国(2) 欧洲专利局(EPO)(2) 日本(2) |
| IPC部 |
H(5)
C(3)
D(2)
|
| IPC大类 |
H01(4)
C01(3)
C23(2)
|
| IPC小类 |
H01L(4)
C01B(3)
C23C(2)
|
| IPC |
C01B032/186(3)
H01L021/02(3)
H01L029/16(3)
C23C016/26(2) H01L021/324(2) H01L029/66(2) |
| 发明人 |
SHIN H(9)
|
| 公开年 | 2020(6) 2021(3) |
| 申请年 |
2019(9)
|
| 专利权人 | SAMSUNG ELEC.(6) UNIV HANYANG.(2) |
HANTAEHEE, LEE S H, EOM W, SHIN H
HANTAEHEE, LEE S H, EOM W, SHIN H
LEE E, BYUN K, SONG H, SHIN H, KIM C, SHIN K, LEE C, JUNG A, BYUN K E, SONG H J, SHIN H J, SHIN K W, LEE C S, JUNG A R
SHIN H, SHIN K, KIM C, NAM S, BYUN K, SONG H, LEE E, LEE C, JUNG A, CHO Y, SHIN H J, SHIN K W, NAM S G, BYUN K E, SONG H J, LEE C S, JUNG A R, CHO Y C
SHIN K, KIM C, YAMAMOTO K, LEE C, SONG H, LEE E, BYUN K, SHIN H, AN S, SHEN J, JIN C, SHAN B, LI C, SONG X, LI Y, BIAN Q, SHEN X, AN X, SHIN K W, LEE C S, SONG H J, BYUN K E, SHIN H J, AHN S J
HEO J, LEE Y, JO S, SHIN K, SHIN H, XU Z, LI R, ZHAO C, SHEN J, SHEN X, HEO J S, LEE Y S, SHIN K W, SHIN H J
NAM S, SHIN H, SHIN K, KIM C, BYUN K, SONG H, LEE E, LEE C, JUNG A, CHO Y, NAM S G, SHIN H J, SHIN K W, BYUN K E, SONG H J, LEE C S, JUNG A R, CHO Y C
KIM C, SHIN H, BYUN K, SHIN K, LEE C, NAM S, AN S, LEE J, CHO Y, SHIN H J, BYUN K E, SHIN K W, LEE C S, NAM S G, AHN S J, LEE J H, LEE J I, CHO Y C
