| 国家/地区 | 中国(13) |
| IPC部 | C(9) H(5) |
| IPC大类 |
C01(7)
H01(5)
C23(2)
|
| IPC小类 |
C01B(7)
H01L(5)
C23C(2)
|
| IPC |
C01B032/186(4)
C01B031/04(3)
H01L021/02(3)
H01L021/265(2) H01L021/324(2) |
| 发明人 |
ZHENG X(13)
|
| 公开年 | 2015(5) 2017(3) 2014(2) 2016(2) |
| 申请年 | 2015(7) 2013(3) 2014(2) |
| 专利权人 |
SHANGHAI INST MICROSYSTEM INFORMATION(13)
|
DI Z, WANG Z, WANG G, ZHENG X, DAI J, XUE Z, ZHANG M, WANG X
DI Z, WANG Z, DAI J, WANG G, ZHENG X, XUE Z, ZHANG M, WANG X
DI Z, WANG Z, DAI J, WANG G, ZHENG X, XUE Z, ZHANG M, WANG X
DI Z, JIA P, MA J, WANG G, WANG X, XUE Z, ZHANG M, ZHENG X
DI Z, CHEN D, DING G, GUO Q, MA J, WANG G, XIE X, XUE Z, ZHANG M, ZHENG X, DAI J
DI Z, JIA P, WANG G, XUE Z, ZHANG M, ZHENG X, DAI J
DI Z, WANG G, XUE Z, ZHANG M, ZHENG X, DAI J, WANG Z
DI Z, WANG G, XUE Z, ZHANG M, ZHENG X, DAI J, WANG Z
DI Z, WANG G, SHI X, XUE Z, ZHANG M, ZHENG X, DAI J
DI Z, CHEN D, DING G, GUO Q, LI J, LIU X, WANG G, XIE X, ZHANG M, ZHENG X
