国家/地区 韩国（49）
IPC部 C（49）
IPC大类 C01（49）
IPC小类 C01B（49）
IPC C23C016/02（49）
发明人 SHIN H（7） SHIN H J（7） MATSUMOTO T（6）
LEE C（5） LEE C S（5） SHIN K（5）
SHIN K W（5） BYUN K（4） BYUN K E（4）
LEE E（4） IFUKU R（3） KIM C（3）
LI Y（3） PARK S（3） SONG H（3）
公开年 2021（10） 2013（5） 2014（4） 2017（4） 2022（4） 2011（3） 2015（3） 2016（3） 2018（3） 2020（3） 2023（3） 2009（2）
申请年 2020（8）  2021（7）  2013（5）  2016（5）  2014（4）  2017（4）  2011（3）  2008（2）  2012（2）  2015（2）  2019（2）  2022（2） 
专利权人 SAMSUNG ELEC.（9） TOKYO ELECTR.（6） UNIV IND AC.（3） UNIV SUNGKYU.（3）
LAM RES CORP（2） SRC CORP（2） UNIV CALIFOR.（2） UNIV SUNGKYU.（2）
UNIV SUNGKYU.（2）

Flexible graphene thin film used for transparent electrode devices, comprises flexible substrate, titanium buffer layer grown on one side of flexible substrate by sputtering and graphene thin film layer grown in-situ in same equipment.

YOON S G, IREH H

Film forming method involves loading substrate into processing container, forming interface layer having amorphous structure or microcrystalline structure on substrate by plasma of first mixed gas including carbon-containing gas and forming graphene film on interface layer.

NAKAMURA G, TERADA H, MATSUMOTO T, KABUKI N, WADA M, IFUKU R, NAKAMURA K, KAMURAGI N

Method of forming nano crystalline graphene, involves arranging substrate having pattern in reaction chamber, injecting reaction gas into reaction chamber, reaction gas including carbon source gas, inert gas, and hydrogen gas that are mixed, generating plasma of reaction gas in reaction chamber.

LEE C, JUNG A, SHIN H, SHIN K, SHIN K W, SHIN H J, JUNG A R, LEE C S

Twin-chamber roll-to-roll graphene film manufacturing device useful for transparent display and flexible display having upper chamber with supply roller for supply catalytic metal film and winding roller for winding catalytic metal film.

KI K Y

Nanocrystalline graphene used for complementary metal-oxide-semiconductor process, comprises grains in stack of graphene sheets.

KIM S, BYUN K, CHO Y, SHIN K, LEE E, LEE C, SONG H, SHIN H, YOON J, LEE S, LIM H, BYUN K E, CHO Y C, SHIN K W, LEE C S, SONG H J, SHIN H J, SU Y J, LEE S Y, LIM H S, LI Z, YOUN J, SHEN X, LI C, LI Y, ZHAO L, JIN S

Tantalum carbide-coated carbon material for e.g., LED manufacturing equipment, comprises a carbon substrate, and a tantalum carbide coating layer formed on the carbon substrate.

JO D W, CAO D, WAN J, CHO D W

Manufacturing monocrystalline graphene for display, secondary battery, solar cell, light-emitting device, catalyst and sensor, involves supplying aromatic carbon gas onto single-crystalline metal catalyst to manufacture graphene.

KIM B J, CHOI J, CHOI J Y, JUN K

Carrier substrate for transferring transfer layer from carrier substrate to product substrate, comprises carrier base substrate, protective layer, and transfer layer grown on protective layer.

BURGGRAF J, JUERGEN B

Large-area graphene continuous deposition apparatus, has classifier for sorting carbon particles generated in pyrolyzer by size, and injector configured to grow graphene layer by spraying particles selected by classifier onto titanium layer.

YOUN D H, GYU S, KIM T J

Two-dimensional material forming apparatus comprises substrate moving unit, and two-dimensional material forming unit for forming two-dimensional material by spraying carbon gas on substrate moved by substrate moving unit.

SHIN U C