国家/地区 美国（41） 中国（32） 韩国（25） 世界知识产权组织（22） 欧洲专利局（EPO）（16） 日本（12） 台湾（9） 德国（4） 新加坡（3） 澳大利亚（2） 英国（2）
IPC部 C（64）
IPC大类 C23（64）
IPC小类 C23C（64）
IPC C23C016/46（64）
发明人 WON D（7） NAM W（6） WON D K（4）
LEE J（3） LIU X（3） TEO K B K（3）
THOMAS S（3） AHN S J（2） AN S（2）
BINDER A（2） CUI H（2） GUINEY I（2）
HONG B H（2） IFUKU R（2） JOUVRAY A（2）
公开年 2012（7） 2015（7） 2017（7） 2021（7） 2022（6） 2014（5） 2019（5） 2013（4） 2016（4） 2018（4） 2020（3） 2023（3） 2011（2）
申请年 2021（9）  2013（8）  2014（7）  2016（7）  2017（7）  2019（6）  2011（4）  2020（4）  2012（3）  2015（3）  2022（3）  2010（2） 
专利权人 NPS CORP（6） HANWHA TECHW.（5） HANWHA AEROS.（4） SAMSUNG TECH.（4）
AIXTRON SE（3） SAMSUNG ELEC.（3） BASF SE（2） BEIJING GRAP.（2）
GRAPHENE SQU.（2） HONG B H（2） KOREA INST S.（2） PARAGRAF LTD（2）
RIJKSUNIV LE.（2） TOKYO ELECTR.（2） UNIV JILIN（2） UNIV SINGAPO.（2）
UNIV SUNGKYU.（2）

Substrate processing apparatus for manufacturing semiconductor device, comprises substrate support to support multiple substrates such that substrates are on substrate support, chamber sidewall surrounding side surface of substrate support, and upper plate having plate portions on substrate support.

OH S, AN S, LEE J, JEONG G, JUNG K O, LEE J H, AHN S J, OH S R

Growing graphene layer structure on substrate used in opto-electronic device, e.g., solar cell, solar cell, light-emitting diode, organic light-emitting diode, electro-optic modulator, photodetector or diode, involves providing substrate on susceptor in chemical vapor deposition reaction chamber.

THOMAS S, GUINEY I, DIXON S

Box type negative-pressure roll-to-roll preparation device, has protective gas and carbon source supply mechanism connected with box body to introduce carbon source and protective gas into box body.

WU Q, SONG S, MA Y

Preparation of two-dimensional chromium material involves mixing chromium source with additive material to form first gaseous precursor and processing sulfide source to form second gaseous precursor, and transferring first and second gaseous precursors to substrate and heating obtained substrate.

XIAO H, XU M

Composite base system for thin film deposition device, has first base comprising top surface and bottom surface opposite to each other, and radio frequency heating coil coaxially surrounded around second base.

LIU L, ZHENG D, XU C

Apparatus for depositing two-dimensional material, comprises planar high-frequency antenna formed on second surface of dielectric window, and first gas nozzle configured to provide source gas into chamber.

SHIN H, SHIN K, LEE C, LEE C S, SHIN K W, SHIN H J

Heating furnace for use in chemical vapor deposition reaction device, has graphite plate supporting wafer substrate, where one side surface used for substrate is provided with growth graphene.

XUE Z, CHEN Z, SHAN J, WANG M, SUN J, LIU Z

Graphene film preparation device useful for heating in pipe, comprises heating element, which is embedded in the quartz tube and forming heating cavity with quartz tube, the heating cavity is placed by substrate, and air supply assembly forming graphene film on the substrate.

QING F, LI X, HE Q

Method for manufacturing flexible strain sensor used for detecting human body motion, involves etching to remove metal mesh screen to ensure flexibility of sensing material if substrate is non-metal stretchable mesh screen.

CHEN X, LI Z, WANG M, MA Y

Chemical vapor deposition device for realizing continuous growth of graphene film on surface of graphene glass, comprises reaction unit for generating thin film on substrate by chemical vapor deposition reaction, and bearing panel.

GAO X, ZHENG K, LIU B, GU W