国家/地区 |
美国(16)![]() |
IPC部 |
C(16)![]() |
IPC大类 |
C23(16)
H01(16)
C01(13)
B82(4) C30(4) H05(3) |
IPC小类 |
C23C(16)
C01B(13)
H01L(12)
H01B(5) B82Y(4) C30B(4) H01M(2) H05K(2) |
IPC |
C23C016/26(16)![]() |
发明人 | CHEN Y(2) DAVIS M A(2) |
公开年 | 2014(8) 2015(7) |
申请年 |
2014(16)![]() |
专利权人 | DAVIS M A(2) SOLAN LLC(2) |
MATHARU J, THOMAS S, TEO K B K, JOUVRAY A, JOUBEUREI A, MATARU J, TOMASEU S
STRUDWICK A, SCHWAB M G, MUELLEN K, SACHDEV H, WEBER N, BINDER A, MULLEN K, STRUDWICK A J, WEBER N E
LI A W, HUNT J H, HOWE W R
LIU X, MANLEY R G, MORENA R M, SONG Z
RUOFF R S, ZHANG L L, STOLLER M D
PARK H B, KIM H, YOON H W, PARK S M, LEE M Y, HO B P, HEE W Y, SUN M P, YONG L M, LEE M, PARK H, PARK S, YOON H