国家/地区 韩国（39）
IPC部 C（39）
IPC大类 C23（39）
IPC小类 C23C（39） H01L（25） C01B（17）
H01M（13） H01J（6） H01G（5）
B01J（4） B22F（3） B82Y（3）
C25D（3） B05D（2） B32B（2）
C01G（2） C04B（2） C09D（2）
IPC C23C016/26（24） H01L021/02（16） C23C016/02（10）
C23C016/455（9） H01M010/052（9） C01B032/186（7）
C23C016/56（7） H01M004/36（7） H01M004/38（7）
H01M004/62（7） C23C016/34（6） C23C016/44（6）
H01J037/32（6） H01L021/285（6） C01B032/194（5）
发明人 IFUKU R（4） MATSUMOTO T（4） SHIN H（4）
SHIN H J（4） BYUN K（3） BYUN K E（3）
LEE C（3） LEE C S（3） NARKEVICIUTE I（3）
SHEN X（3） VARADARAJAN B N（3） AHN W（2）
AHN W S（2） GABEN F（2） KIM H（2）
公开年 2021（39）
申请年 2020（25）  2021（9）  2019（5） 
专利权人 SAMSUNG ELEC.（5） TOKYO ELECTR.（4） UNIV SUNGKYU.（4） KOREA INST S.（3）
LAM RES CORP（3） DAEJOO ELECT.（2） UNIV SINGAPO.（2）

Selective deposition on dielectric layer comprises providing semiconductor substrate, selectively depositing graphene on exposed metal surface of metal layer of substrate, and selective depositing dielectrically-deposited material on layer.

NARKEVICIUTE I, VARADARAJAN B N, SHARMA K, NARKEBICHUDDER I

Method for forming film e.g. graphene film on substrate, involves supplying aromatic hydrocarbon gas having functional group, to substrate on which base film is formed, and activating aromatic hydrocarbon gas adsorbed on surface of base film by plasma of reaction gas containing rare gas.

MATSUMOTO T, IFUKU R

Anode current collector useful in lithium ion battery and supercapacitor, comprises aluminum conductive thin film, and graphene layer transferred to one surface of aluminum thin film.

YANG C M, KIM S Y, WEE J

Growing two-dimensional transition metal chalcogenide film for manufacturing e.g. diode, involves placing patterned metal layer on substrate surface, supplying chalcogen precursor and transition metal precursor to chamber, and evacuating.

LEE E, AHN W, KIM H, LEE H, LEE H S, KIM H S, AHN W S, HA L

Multielement co-doped graphene quantum dots for e.g. supercapacitor electrode, comprise element doped by plasma treatment by placing graphene quantum dots doped with other element on moving stage that reciprocates, rotates, or vibrates in horizontal direction to uniformly plasma-treat quantum dots.

SHIM W, SIM Y, KIM J Y, MUN J H, HO J C, KIM S J

Silicon-based-carbon composite useful in cathode material of lithium secondary battery, comprises core-shell structure, where core includes e.g. silicon and magnesium silicate, and the shell includes first and second carbon layers.

HYUN L J, HUNSOO P, LEE S, HEE L, LIM J

Conductive structure, comprises conductive material layer including metal and work function control layer including two-dimensional material with defect, to control work function of conductive structure.

LEE C, KIM C, LEE E, BYUN K, KIM S, SHIN H, SHIN H J, BYUN K E, LEE C S, LI C, JIN C, LI Y, JIN S, SHEN X

Carrier substrate for transferring transfer layer from carrier substrate to product substrate, comprises carrier base substrate, protective layer, and transfer layer grown on protective layer.

BURGGRAF J, JUERGEN B

Producing hexagonal boron nitride or graphene two-dimensional composite material, involves obtaining obtaining germanium substrate, depositing hexagonal boron nitride on germanium substrate by controlling area and depositing graphene.

LEE J, HYEON S H, HYEONG S

Manufacture of lithium-ion battery used for e.g. phone and laptop, involves e.g. depositing dense layer comprising anode, cathode and/or electrolyte, by supplying substrate and suspension of non-agglomerated nanoparticles of material having preset size, and performing densification of dried layer.

GABEN F