国家/地区 中国（9） 美国（3）
IPC部 C（10）
IPC大类 C23（10）
IPC小类 C23C（10） B82Y（3） G01N（3）
C01B（2） G03F（2） H01L（2）
IPC C23C014/16（10）
发明人 ZHANG J（3） CHEN C（2） SHI G（2）
TU C（2） ZHANG X（2）
公开年 2020（3） 2022（3） 2018（2）
申请年 2020（3）  2022（3）  2016（2） 
专利权人 TAIWAN SEMIC.（2） UNIV CHANGCH.（2）

Method for preparing self-cleaning composite surface enhanced Raman scattering (SERS) substrate used in surface science, analysis science and biological science involves sputtering gold nano-particles to surface of zinc oxide film to obtain SERS substrate.

LI J, ZHANG X, SHI G, WANG B, ZHANG J

Preparing flexible strain sensor based on vertical graphite comprises adding flexible substrate fluorocrystalline mica sheet into magnetron sputtering apparatus, adding prepared interdigital electrode substrate, passing methane/hydrogen/argon mixed gas and excapsulating with polydimethylsiloxane.

ZHANG J, WANG J, ZHANG L, LUO K, WANG Q

Anti-corrosion protective sleeve for optical cable, has antistatic layer that is prepared by depositing nano-spherical graphene nano-wire surface preparing anti-static layer using dielectric barrier discharge plasma auxiliary chemical vapor deposition.

JIANG Y

Soft X-ray filter useful in detection field, comprises graphene support layer surface coated with aluminum film and fixed with frame structure.

WENG Z, MENG J

Raman enhanced structure for detection of pesticide, has copper-based graphene substrate that comprises pits distributed in square array, where pits are cone-shaped structure and gold nanoparticle layer is arranged on graphene substrate.

ZHANG J, JIA T, ZHANG X, SHI G, CAI H

Graphene-based phase modulator has substrate layer, metal layer and sandwich structure that includes lower confinement layer, graphene layer and upper confinement layer that are arranged in order from bottom to top.

WANG S, ZHANG Q, HU Z, CAI M, DU L, ZHANG H, CHEN Y, ZHOU Z

Upright working electrode for graphene glucose enzyme useful in biosensor comprises vertical few-layer graphene film, glucose oxidase layer coated on surface of graphene film, and porous hydrophilic protective functional film.

SHI L, ZHAO X, ZHONG X, CHEN W

Method of making a pellicle for use in extreme ultraviolet (EUV) lithography system, by depositing graphene layer over first material layer, and depositing amorphous silicon layer over graphene layer.

TU C, CHEN C, YOO C S, CHANG J, TSAI C, LIU P, LEE H, LIN C, LIN Y, TU Z, CHEN J, CAI J, YOU Q, ZHANG Z, LIN Z, LIU B, LI X, YOO C

Graphene pellicle method for extreme ultraviolet lithography, involves attaching carrier to graphene layer, removing substrate from first assembly, and removing first material layer from first assembly.

TU C, CHEN C

Graphene composite electrode material preparation method, involves providing glass substrate, forming metal thin film on glass substrate, and patterning metal thin film to form circuit image.

WANG Y