国家/地区 美国（10）
IPC部 C（10） H（7） B（3）
IPC大类 C01（10）
IPC小类 C01B（10）
IPC C01B032/186（6） C23C016/26（6） H01L021/285（4）
C23C016/02（3） H01L021/768（3） H01L023/532（3）
C01B032/05（2） C23C016/50（2） C23C016/513（2）
C23C016/54（2） H01B001/04（2） H01J037/32（2）
H01L021/02（2）
发明人
公开年 2022（10）
申请年 2021（10）
专利权人 APPLIED MATE.（2）

Depositing graphene layer on substrate in plasma enhanced chemical vapor deposition of graphene at low temperatures, involves providing substrate within modular microwave plasma chamber, and flowing carbon source and hydrogen source into modular microwave plasma chamber.

KRAUS P A, NGUYEN H, MEBARKI B, WANG C, VALENCIA C, CHUA T C

Processing semiconductor by generating plasma of carbon- and hydrogen-containing precursors, forming layer of graphene on substrate, and halting flow of carbon-containing precursor while maintaining plasma with hydrogen-containing precursor.

INGLE N K, MALLICK A B, SINGHA R S, WANG J, ROY S S

Active material used in negative electrode for lithium secondary battery, comprises pores having preset size, and silicon-based compound having preset ratio of peak intensity in region having specific wavelength in Raman spectrum.

PARK G O, YOO S K, CHUNG J H, ZHENG Z, YU S, PARK G

Multilayer electrically conductive wire for use in aeronautics field to lighten airplane, has central support core, set of pairs of layers around central support core comprising intercalary layer made of non-carbon based material and graphene layer, and first layer arranged on outer surface.

LEKARSKI K

Tantalum carbide-coated carbon material for e.g., LED manufacturing equipment, comprises a carbon substrate, and a tantalum carbide coating layer formed on the carbon substrate.

JO D W, CAO D, WAN J, CHO D W

Forming graphene on flexible substrate, involves providing polymer substrate including metal structure, carbon source and carrier gas, and subjecting polymer substrate to plasma enhanced chemical vapor deposition process.

TSENG C, LIN C, YEH N, LEU C, LU C

Forming graphene film involves depositing carbon source onto substrate within deposition environment comprising vacuum to form graphene film on substrate, where carbon source comprises coal, coal component, or combination.

LAUMB J, TIBBETTS J, AZENKENG A

Forming bulk product utilized for forming real-world components, involves coating particulate conductive phase material with binder phase using deposition coating process, and forming coated conductive phase material into bulk material.

SHEEDY P, SCHMIDT W R

Forming graphene product including nanocrystalline graphene by plasma enhanced chemical vapor deposition process, involves growing nanocrystalline graphene directly on substrate using plasma of reaction gas.

LEE E, LEE S, BYUN K, KIM C, LEE C, SHIN H, SHIN K, SONG H

Manufacturing monocrystalline graphene for display, secondary battery, solar cell, light-emitting device, catalyst and sensor, involves supplying aromatic carbon gas onto single-crystalline metal catalyst to manufacture graphene.

KIM B J, CHOI J, CHOI J Y, JUN K