国家/地区 中国（19） 美国（10） 世界知识产权组织（10） 韩国（8） 日本（6） 英国（3） 台湾（3） 澳大利亚（2） 德国（2） 欧洲专利局（EPO）（2）
IPC部 C（38）
IPC大类 C01（38）
IPC小类 C01B（38）
IPC C01B032/186（38）
发明人 SHIN H（3） BYUN K（2） BYUN K E（2）
CHENG J（2） FAN L（2） GLASS H（2）
GUINEY I（2） HE H（2） KIM C（2）
LEE C（2） LEE C S（2） LEE E（2）
SHIN H J（2） SHIN K（2） SHIN K W（2）
公开年 2021（19） 2020（17） 2022（2）
申请年 2020（38）
专利权人 SAMSUNG ELEC.（3） PARAGRAF LTD（2） UNIV YANGZHO.（2）

Deposition of two-dimensional layers on substrate in process chamber, involves heating substrate, feeding reactive gas of carbon-containing chalcogenide, and adjusting substrate temperature, process chamber pressure, and partial pressure of reactive gas so that graphene is deposited as layer.

MCALEESE C, CONRAN B R, TEO K B K

Preparation method of copper-based graphene, involves removing copper-based graphene precursor from impurities by solvent separation method, and drying copper-based graphene precursor to form copper-based graphene finished product.

WU G, QIAN T, CAO H, MA Y, SHEN H

Device for preparing graphene by plasma enhanced chemical vapor deposition (PECVD), has first region of deposition furnace that is provided with overlapped portion, and second polar plate that is connected to grounding end of plasma source.

LIU Z, WU Q, CAO F, WANG X, WANG K, YANG H, PENG H

Continuous production apparatus of multiple types of carbon film, comprises reduction section for reducing substrate placed on belt conveyor, and raw material carbon source supply section that supplies raw material carbon source.

WATANABE J

Multi-layer graphene laminate used in electronic devices, comprises catalyst metal layer and stacked structure comprising graphene layer grown on one surface of catalyst metal layer.

YOON S G, IREH H

Large-area graphene continuous deposition apparatus, has classifier for sorting carbon particles generated in pyrolyzer by size, and injector configured to grow graphene layer by spraying particles selected by classifier onto titanium layer.

YOUN D H, GYU S, KIM T J

Two-dimensional material forming apparatus comprises substrate moving unit, and two-dimensional material forming unit for forming two-dimensional material by spraying carbon gas on substrate moved by substrate moving unit.

SHIN U C

Carbon film comprises first layer containing flat graphene, and second layer formed on the first layer containing arc-shaped graphene.

OOTA R, NAKANISHI K, OZAWA Y

Coating metal workpiece e.g. electrical connector, involves exposing workpiece to carbon-containing precursor gas and hydrogen gas at preset flow rate and total gas pressure, and exposing to carbon-containing precursor gas and carrier gas.

ADAMS H J

Growing graphene selectively involves forming ion implantation region and ion non-implantation region in substrate by implanting ions locally into substrate and selectively growing graphene in ion implantation region.

LEE E, SHIN H, SHIN K, BYUN K, KIM C, LEE C, LEE C S, BYUN K E, SHIN K W, SHIN H J