国家/地区 美国（76）
IPC部 C（76）
IPC大类 C01（76）
IPC小类 C01B（76）
IPC C23C016/02（76）
发明人 SHIN H（8） SHIN H J（7） MATSUMOTO T（6）
NAGEL C J（6） BRODEUR C L（5） ELSAYED K A M（5）
LEE C（5） LEE C S（5） MAAROUF A A（5）
SHIN K（5） SHIN K W（5） BYUN K（4）
BYUN K E（4） LEE E（4） CHOI J（3）
公开年 2021（12） 2013（11） 2016（8） 2017（7） 2022（6） 2012（5） 2015（5） 2023（5） 2014（4） 2020（4） 2011（3） 2009（2） 2018（2）
申请年 2016（9）  2020（9）  2021（9）  2013（8）  2011（7）  2022（7）  2012（6）  2014（5）  2017（5）  2015（4）  2008（2）  2018（2） 
专利权人 SAMSUNG ELEC.（11） QUANTUM ELEM.（6） TOKYO ELECTR.（6） UNIV IMAM AB.（5）
UNIV SUNGKYU.（3） CENT NAT REC.（2） CHINESE ACAD.（2） CORNING INC（2）
DENG P（2） ECOLE POLYTE.（2） GUO H（2） LAM RES CORP（2）
LEI T（2） PURDUE RES F.（2） SHANGHAI INS.（2） SRC CORP（2）
UNIV CALIFOR.（2） UNIV SUNGKYU.（2） UNIV SUNGKYU.（2） UNIV XIDIAN（2）

Film forming method involves loading substrate into processing container, forming interface layer having amorphous structure or microcrystalline structure on substrate by plasma of first mixed gas including carbon-containing gas and forming graphene film on interface layer.

NAKAMURA G, TERADA H, MATSUMOTO T, KABUKI N, WADA M, IFUKU R, NAKAMURA K, KAMURAGI N

Process for instantiating elemental metal within ultramicro pore of nanoporous carbon powder composition involves initiating gas flow in reactor assembly, reactor chamber containing nanoporous carbon powder, first porous frit, second porous frit, reactor head space, and computer processing unit.

BRODEUR C L, NAGEL C J

Transparent electrode for solar cell, comprises transparent substrate and composite layer disposed on transparent substrate, where composite layer comprises graphene layer and set of nanoparticles, where nanoparticles are embedded in graphene layer and extend through thickness of graphene layer.

ELSAYED K A M, MAAROUF A A

Preparing solar cell involves heating substrate deposited with nanoparticles, forming composite layer with graphene layer, cooling, disposing transparent substrate having quartz, glass and polymers such as polymethylmethacrylate, polystyrene, fabricating electrode, forming cathode and electrolyte.

ELSAYED K A M, MAAROUF A A

Method of forming nano crystalline graphene, involves arranging substrate having pattern in reaction chamber, injecting reaction gas into reaction chamber, reaction gas including carbon source gas, inert gas, and hydrogen gas that are mixed, generating plasma of reaction gas in reaction chamber.

LEE C, JUNG A, SHIN H, SHIN K, SHIN K W, SHIN H J, JUNG A R, LEE C S

Reactor assembly comprises gas inlet and one or more gas outlets and reactor chamber containing nanoporous carbon material arranged within cup and covered with cap, where first porous frit defining floor of reactor chamber arranged within cup and covered with cap, and second porous frit.

BRODEUR C L, NAGEL C J

Nanocrystalline graphene used for complementary metal-oxide-semiconductor process, comprises grains in stack of graphene sheets.

KIM S, BYUN K, CHO Y, SHIN K, LEE E, LEE C, SONG H, SHIN H, YOON J, LEE S, LIM H, BYUN K E, CHO Y C, SHIN K W, LEE C S, SONG H J, SHIN H J, SU Y J, LEE S Y, LIM H S, LI Z, YOUN J, SHEN X, LI C, LI Y, ZHAO L, JIN S

Depositing graphene layer on substrate in plasma enhanced chemical vapor deposition of graphene at low temperatures, involves providing substrate within modular microwave plasma chamber, and flowing carbon source and hydrogen source into modular microwave plasma chamber.

KRAUS P A, NGUYEN H, MEBARKI B, WANG C, VALENCIA C, CHUA T C

Making solar cell involves depositing multiple nanoparticles on surface of chemical vapor deposition substrate, heating substrate and nanoparticles at sub-atmospheric pressure, and contacting gaseous mixture comprising methane and hydrogen with nanoparticles.

ELSAYED K A M, MAAROUF A A

Tantalum carbide-coated carbon material for e.g., LED manufacturing equipment, comprises a carbon substrate, and a tantalum carbide coating layer formed on the carbon substrate.

JO D W, CAO D, WAN J, CHO D W