国家/地区 中国（14） 韩国（2） 世界知识产权组织（2）
IPC部 C（18）
IPC大类 C30（18） C01（5） C23（4）
H01（4） C09（3） B32（2）
IPC小类 C30B（18）
IPC C30B029/06（18）
发明人 GAO Y（2） JU Q（2） LI S（2）
MA Y（2） WANG J（2） WANG W（2）
ZHANG P（2）
公开年 2021（4） 2018（3） 2020（3） 2011（2） 2019（2） 2023（2）
申请年 2018（4）  2019（4）  2021（4）  2011（2）  2022（2） 
专利权人 HEFEI YUNRON.（2） SHANGHAI INS.（2）

Pellicle used for reticle for extreme-UV exposure, comprises pellicle film through which extreme-UV rays transmit and support frame for supporting pellicle film, where pellicle film comprises multilayer thin film structure.

KIM Y H, KIMYONGHWAN

Preparation of folding-resistant high-peeling aluminum-coated fabric involves coating coupling agent on etched surface of aluminum foil, coating conductive adhesive on coupling agent layer, pressing fabric on adhesive layer, and sewing.

CHEN Y, YE W, SUN Q, LONG X

Graphite substrate useful for manufacturing light emitting diode epitaxial wafer in semiconductor field, comprises graphite disc and multiple annular isolation layer, where surface of graphite disc is provided with multiple grooves for containing epitaxial wafer.

LI P, LU X, XIAO Y, GUO B, DING T, GE Y

Long-life guide cylinder comprises e.g. outer layer as pre-oxidized felt insulating felt, middle layer as modified resin formed on inner side wall of outer layer, and inner layer as carbon/carbon composite material formed on inner side wall of middle layer.

BAI Y, QIN X, LIU Y, ZHOU J

High thermal conductivity composite crucible useful for polycrystalline silicon ingot comprises crucible body having cavity structure with open upper end, and quartz ceramic structure layer laid on graphene-silica composite material layer.

LI J, XIE Y, GAO Y

Thin film growth structure comprises a board, fluid support layer, base that is formed on an upper surface of flowable support layer, substrate, and flowable support layer which is thin film formed of material that maintains a liquid state.

LEE I, WUK L W

Graphite heating device for monocrystalline silicon production, includes universal wheels are fixed at the corners of the bottom of the base, and supporting feet are fixed at the bottom of the base on one side of the universal wheel.

SONG S, GAO Y, ZHANG P, QI Y, HE X, YANG Y

Graphene/silicon nanowire hybrid material powder mass useful in anode for lithium ion battery, comprises silicon nanowires inter-mixed with graphene sheets.

ZHAMU A, SU Y, YIN J, JANG B Z

Producing pressure sensor by depositing silicon oxide layer on silicon wafer surface, depositing chromium/gold layer, penetrating metal and oxide layers, nanostructuring silicon, depositing aluminum film on wafer and transferring graphene.

AVRAM M A, AVRAM M, TINCU B C, VOITINCU C, TUCUREANU V, MATEI A, BURINARU T A, MARCULESCU C V

Preparation of easy differentiation polycrystalline silicon wafers involves mixing aluminum alloy powder and silicon carbide, spraying with graphene ethanol dispersion, pickling, refining, degassing, machining and bonding with core plates.

WANG X