| 国家/地区 | 中国(11) |
| IPC部 | H(8) C(3) |
| IPC大类 | H01(8) C23(2) |
| IPC小类 | H01L(8) C23C(2) |
| IPC |
H01L021/336(5)
C23C016/01(2)
C23C016/26(2)
C23C016/56(2) H01L021/28(2) H01L029/78(2) |
| 发明人 |
JIN Z(7)
SHI J(7)
WANG X(7)
ZHANG D(7) WANG S(5) MA P(4) PENG S(3) ZHU H(2) |
| 公开年 |
2015(11)
|
| 申请年 | 2014(8) 2015(2) |
| 专利权人 |
INST MICROELECTRONICS CHINESE ACAD SCI(11)
|
CAO L, GUO X, HOU F, WAN L, SU M, WANG Q, ZHOU Y
LV H, LIU M, LIU Q, SUN H, ZHANG K, BENAGI R, BANERJEE W
SU Y, ZHU H, ZHAO C, GU K
JIN Z, PENG S, WANG X, ZHANG D, WANG S, SHI J
JIN Z, MA P, WANG X, ZHANG D, SHI J
JIN Z, PENG S, WANG X, ZHANG D, WANG S, SHI J
JIN Z, PENG S, WANG X, ZHANG D, WANG S, SHI J
JIN Z, MA P, WANG X, ZHANG D, SHI J
JIN Z, MA P, WANG X, ZHANG D, WANG S, SHI J
