国家/地区 日本（27）
IPC部 C（27）
IPC大类 C23（27）
IPC小类 C23C（27） H01L（15） C01B（13）
H01M（8） H01J（7） B82Y（6）
C25D（5） H01R（4） B01J（3）
B22F（3） H01B（3） H05H（3）
C01G（2）
IPC C23C016/26（11） H01L021/02（9） C01B032/186（8）
B82Y030/00（6） H01J037/32（5） H01M004/04（5）
B82Y040/00（4） C23C016/02（4） C23C016/04（4）
C23C016/44（4） C23C016/455（4） H01L021/285（4）
H01L021/768（4） H01R013/03（4） B01J037/02（3）
发明人 IFUKU R（4） KUBO T（4） MATSUMOTO T（4）
SHIMIZU T（4） OKADA M（3） YE N（3）
GABEN F（2） HATAKEYAMA K（2） KAWAI H（2）
KAWAI Y（2） KOGA K（2） NARKEVICIUTE I（2）
SEKI K（2） SUGIURA M（2） UEDA H（2）
公开年 2021（27）
申请年 2020（17）  2021（7）  2019（3） 
专利权人 YAZAKI CORP（5） TOKYO ELECTR.（4） NAT INST ADV.（3） LAM RES CORP（2）
UNIV SINGAPO.（2）

Method for forming film e.g. graphene film on substrate, involves supplying aromatic hydrocarbon gas having functional group, to substrate on which base film is formed, and activating aromatic hydrocarbon gas adsorbed on surface of base film by plasma of reaction gas containing rare gas.

MATSUMOTO T, IFUKU R

Loaded body for fuel cell, has sputtering source, pulse power supply, inert gas supply unit and nanocluster growth cell, where when nanoclusters are produced in vapor phase using nanocluster generating device, and nanoclusters are supported on carrier, each carriers loaded with nanoclusters.

NAKAJIMA A, TSUNOYAMA H, UNO M, GUNJI H, ANDO T, TSUKAMOTO K, TONA M, HIRATA N

Continuous production apparatus of multiple types of carbon film, comprises reduction section for reducing substrate placed on belt conveyor, and raw material carbon source supply section that supplies raw material carbon source.

WATANABE J

Secondary battery e.g. lithium ion secondary battery used for portable electronic device, has hole transmission element that is sputtered film or vapor deposition film containing dielectric material, and is provided between electrodes.

NAKAJIMA J, DEGAWA A

Manufacture of lithium-ion battery used for e.g. phone and laptop, involves e.g. depositing dense layer comprising anode, cathode and/or electrolyte, by supplying substrate and suspension of non-agglomerated nanoparticles of material having preset size, and performing densification of dried layer.

GABEN F

Manufacture of dense layer of electrochemical device, involves providing substrate and suspension of non-agglomerated nanoparticles of material having specific particle size distribution, depositing layer on substrate, drying and densifying.

GABEN F

Electron-emitting element e.g. cold cathode-type electron source, has coating membrane that is film which transmits electron, and second electrode that is protective film of different material, and comprises electron emission surface.

MURAKAMI K, NAGAO M, KATSUHISA M, MASAYOSHI N

Component for vacuum film formation equipment, has molecular orientation controlling film that is formed in tangential direction of molecular orientation direction of organic molecule adhered to base material surface.

YAMAMOTO K

Seed layer for inducing nucleation to form layer of material used for fabricating semiconducting devices, comprises layer of two-dimensional monolayer amorphous material with disordered atomic structure to form electric potential wells for bonding adatoms to seed layer by van der Waals interaction.

OEZYILMAZ B, TOH C T, ABIDI I H, OJIYLMAZ B, TOH C, ZHUO Z, OZYILMAZ B

Forming layer, comprises e.g. exposing substrate to aromatic precursor in processing chamber, rinsing aromatic precursor from processing chamber, and heating substrate deposit graphene hard mask layer on substrate.

BHUYAN B J, LEONCINI A