国家/地区 |
世界知识产权组织(10)![]() |
IPC部 |
B(10)![]() |
IPC大类 |
C23(10)
C01(8)
B32(4)
H01(4) B01(3) B82(3) C30(2) |
IPC小类 |
C23C(10)
C01B(8)
B32B(4)
B82Y(3) B01J(2) C23F(2) C30B(2) H01L(2) |
IPC |
C23C016/26(10)![]() |
发明人 |
BEDWORTH P V(2)
HEISE S E(2)
SINTON S W(2)
SWETT J L(2) |
公开年 | 2017(8) |
申请年 |
2016(10)![]() |
专利权人 | LOCKHEED MAR.(2) |
CAI H, DUAN C, HVIID L, QIAO L, WANG Y
PARK H G, HEIGHT M, CHOI K, PARK H
HEISE S E, BEDWORTH P V, SWETT J L, SINTON S W
TOMOVIC Z, WEBER N, BINDER A, WAGNER N
ZARETSKI A, LIPOMI D J, SAVTCHENKO A, MOLOKANOVA E, MERCOLA M
JOHNSON B Y, LIU X, MAZUMDER P
AOTA NATSUKO, AIDA HIDEO, TACHIBANA MASARU, MORISAKO SHIYO, AOTA N, AIDA H, TACHIBANA M, MORISAKO S
SWETT J L, BEDWORTH P V, HEISE S E, SINTON S W, SIMON S M