国家/地区 世界知识产权组织（11）
IPC部 C（11）
IPC大类 C23（11）
IPC小类 C23C（10） C01B（4） H01L（4）
B82Y（2） H01G（2） H01M（2）
IPC C23C016/26（6） C23C016/02（5） H01L021/02（4）
B82Y040/00（2） C01B032/15（2） C01B032/182（2）
C23C014/06（2） C23C016/455（2） C23C016/50（2）
C23C016/505（2） C23C016/56（2） H01G011/32（2）
H01L021/768（2）
发明人 NAVEH D Y（2） SHARMA K（2） VARADARAJAN B N（2）
公开年 2023（11）
申请年 2022（11）
专利权人 2D GENERATIO.（2） LAM RES CORP（2） UNIV BARILAN（2）

Plasma deposition of material onto two dimensional layer of first substrate, involves depositing protective layer directly onto dimensional layer by pulsed plasma deposition process, and depositing second layer onto protective layer by second plasma deposition process.

RIAZIMEHR S, KNOOPS H, SUNDARAM R

Corrosion protection unit for electrolytic protection of reinforced structural structure, has modular anode unit (MAU) that includes low carbon alkali-activated geo-polymer cementitious materials (AACM) mortar structure with conductive properties.

DAVIS S, JONES G

Material layer for, e.g. aero-engine applications, comprises porous synthesized carbon-containing composite materials, bonding layer, and hydraulically smooth surface interfacial layer comprising synthesized carbon-containing composite material(s).

STOWELL M, LANNING B

Depositing graphene or graphene oxide onto substrate from gaseous source of carbon precursor involves using plasma-enhanced chemical vapor deposition method, where carbon precursor consists of ethylene and the process is carried out in absence of carrier gas.

JOUIAD M, EL MARSSI M, LEJEUNE M

Depositing nano-graphene comprises flowing hydrocarbon precursors into reaction chamber to adsorb onto metal layer of substrate at specific temperature, where metal layer interacts with adsorbed hydrocarbon precursor.

SHARMA K, VARADARAJAN B N

Coating metal surface with graphene used in organic LED by depositing first graphene molecular precursor on top of metal surface and transforming deposited first graphene molecular precursor into surface bound graphene interfacial layer.

NAVEH D Y

Producing coated nano-ordered carbon particles used in anode within rechargeable battery including sodium-ion batteries and other metal-ion batteries, involve exposing carbon-containing material to expanding agent to produce expanded carbonaceous particles during expanding process.

ENTERKIN J A, WORFOLK B J, ZHANG L

Forming dual damascene structure on semiconductor substrate, involves selectively depositing carbon layer on exposed metal surface.

PARBATANI A, VAN SCHRAVENDIJK B J, VARADARAJAN B N, NARKEVICIUTE I, SRINIVASAN E, SHARMA K, KNARR R, SCHMITZ S, RAMANAN V, NOGAMI T, NGUYEN S V, HUANG H, SHOBHA H K, LI J, PEETHELA C B, EDELSTEIN D C

Formation of graphene layer for semiconductor device, involves exposing substrate comprising conductive and dielectric materials to plasma to clean conductive material, and exposing substrate to another plasma to form graphene layer.

MEBARKI B, CHUA T C, VALENCIA C W, LEE J J, TANG X, CHEN X

Composite material comprises substrate and coating on substrate, where coating comprises diamond-like carbon and carbonaceous multi-layered nanoparticulate.

YANG L, NEVILLE A, BINTI NIK ROSELEY N R, BRITTAIN R N, LISKIEWICZ T W