国家/地区 韩国(16) 美国(12) 中国(5) 欧洲专利局(EPO)(4) 世界知识产权组织(2)
IPC部 H(11) B(10) C(9)
G(2)
IPC大类 H01(11) C01(8) B82(7)
C23(4) B01(2)
IPC小类 H01L(11) C01B(8) B82Y(4)
C23C(4) B82B(3) B01J(2)
IPC H01L029/16(8) H01L029/78(6) C01B031/02(5)
C01B031/04(5) H01L029/06(4) H01L029/66(4)
H01L029/786(4) B82B003/00(3) B82Y010/00(3)
H01L021/336(3) H01L029/08(3) H01L029/10(3)
B01J019/18(2) C23C016/18(2) C23C016/26(2)
发明人 PARK S(16)
公开年 2014(16)
申请年 2013(9)  2014(6) 
专利权人 SAMSUNG ELEC.(10) PARK S(4) BYUN K(3) CHUNG H(3)
HEO J(3) SEO D(3) SNU R DB FO.(3) SONG H(3)
UNIV SUNGKYU.(3) LEE J(2) UNIV SEOUL N.(2)

LEE J, CHUNG H, PARK S, BYUN K, SEO D, SONG H, HEO J, LEE J H, CHUNG H J, PARK S J, BYUN K E, SONG H J, HEO J S, HUH J, JUNG H, SONG C, SAIL D

SHIN H, BYUN K, SONG H, PARK S, SEO D, WOO Y, LEE D, LEE J, CHUNG H, HEO J, YOO I, SHIN H J, BYUN K E, SONG H J, PARK S J, WOO Y S, LEE D W, LEE J H, CHUNG H J, HEO J S, YOO I K, JIN S H, EUN B G, JAE S H, JUN P S, SEOK S H, SEONG W Y, GYEONG Y I, UK L D, HO L J, JONG J H, SEONG H J, HUI D, HUH J, YEO R, JUNG H

BYUN K, PARK S, SEO D, SONG H, LEE J, CHUNG H, HEO J, BYUN K E, PARK S J, SONG H J, LEE J H, CHUNG H J, HEO J S

LEE D W, SHIN H, PARK S, BYUN K, SEO D, SONG H, WOO Y, LEE J, CHUNG H, HEO J, SHIN H J, PARK S J, BYUN K E, SONG H J, WOO Y S, LEE J H, CHUNG H J, HEO J S

LEE J, PARK S, BYUN K, SEO D, SONG H, SHIN H, CHUNG H, HEO J, LEE J H, PARK S J, BYUN K E, SONG H J, SHIN H C, CHUNG H J, HEO J S