国家/地区 韩国(21) 美国(21) 中国(6) 日本(5) 欧洲专利局(EPO)(4)
IPC部 H(22) B(10) C(7)
IPC大类 H01(22) B82(8) C01(7)
C23(3) B32(2)
IPC小类 H01L(21) B82Y(8) C01B(7)
C23C(3) B32B(2) H01B(2)
IPC H01L029/16(13) H01L029/78(13) H01L029/66(10)
H01L029/786(10) H01L021/336(8) H01L029/06(7)
C01B031/02(6) H01L029/08(5) B82Y010/00(4)
C01B031/04(4) H01L029/778(4) H01L051/05(4)
B82Y040/00(3) B82Y099/00(3) C23C016/26(3)
发明人 SEO D(23)
公开年 2014(9) 2013(7) 2011(5) 2015(2)
申请年 2013(11)  2010(3)  2012(3)  2011(2)  2014(2) 
专利权人 SAMSUNG ELECTRONICS CO LTD(23)

LEE J, CHUNG H, PARK S, BYUN K, SEO D, SONG H, HEO J, LEE J H, CHUNG H J, PARK S J, BYUN K E, SONG H J, HEO J S, HUH J, JUNG H, SONG C, SAIL D

SHIN H, BYUN K, SONG H, PARK S, SEO D, WOO Y, LEE D, LEE J, CHUNG H, HEO J, YOO I, SHIN H J, BYUN K E, SONG H J, PARK S J, WOO Y S, LEE D W, LEE J H, CHUNG H J, HEO J S, YOO I K, JIN S H, EUN B G, JAE S H, JUN P S, SEOK S H, SEONG W Y, GYEONG Y I, UK L D, HO L J, JONG J H, SEONG H J, HUI D, HUH J, YEO R, JUNG H

BYUN K, PARK S, SEO D, SONG H, LEE J, CHUNG H, HEO J, BYUN K E, PARK S J, SONG H J, LEE J H, CHUNG H J, HEO J S

LEE D W, SHIN H, PARK S, BYUN K, SEO D, SONG H, WOO Y, LEE J, CHUNG H, HEO J, SHIN H J, PARK S J, BYUN K E, SONG H J, WOO Y S, LEE J H, CHUNG H J, HEO J S

LEE J, PARK S, BYUN K, SEO D, SONG H, SHIN H, CHUNG H, HEO J, LEE J H, PARK S J, BYUN K E, SONG H J, SHIN H C, CHUNG H J, HEO J S