国家/地区 世界知识产权组织（11）
IPC部 C（11） H（6） B（3）
IPC大类 C23（11） C01（8） H01（6）
B01（2） B32（2） C25（2）
C30（2）
IPC小类 C23C（11） C01B（8） H01L（6）
B32B（2） C25D（2） C30B（2）
H01J（2）
IPC C23C016/02（11）
发明人 NARKEVICIUTE I（2） VARADARAJAN B N（2）
公开年 2021（11）
申请年 2020（9）  2021（2） 
专利权人 LAM RES CORP（2）

Carrier substrate for transferring transfer layer from carrier substrate to product substrate, comprises carrier base substrate, protective layer, and transfer layer grown on protective layer.

BURGGRAF J, JUERGEN B

Seed layer for inducing nucleation to form layer of material used for fabricating semiconducting devices, comprises layer of two-dimensional monolayer amorphous material with disordered atomic structure to form electric potential wells for bonding adatoms to seed layer by van der Waals interaction.

OEZYILMAZ B, TOH C T, ABIDI I H, OJIYLMAZ B, TOH C, ZHUO Z, OZYILMAZ B

Encapsulating graphene in semiconductor substrate, comprises selectively depositing graphene on metal layer, depositing metal oxide over graphene by thermal-based deposition technique, and depositing hermetic barrier over metal oxide.

VARADARAJAN B N, NARKEVICIUTE I, SHARMA K

Coating metal workpiece e.g. electrical connector, involves exposing workpiece to carbon-containing precursor gas and hydrogen gas at preset flow rate and total gas pressure, and exposing to carbon-containing precursor gas and carrier gas.

ADAMS H J

Formation of single layer nitrogen-doped graphene in plasma-assisted catalytic surface reaction for e.g. electronics, involves depositing nickel film on substrate, plasma-treating nickel film, and growing nitrogen-doped graphene on nickel.

MOHAMMAD HANIFF M A, ZAINAL ARIFIN N H, SYONO M I

Formation of porous graphene layer used as semipermeable membrane, involves providing catalytically active substrate comprising copper-nickel alloy substrate, to catalyze graphene formation under chemical vapor deposition conditions.

CHOI K, PARK H G, HEIGHT M, CHOI K J, PARK H, PIAO H

Infrared photodetector has mesa on substrate and comprising layer of amorphous silicon for amplifying photocurrent, layer of long wave infrared radiation absorbing material for producing photocurrent, and passivation layers.

LO Y, ZHOU J, MIAH M A R, ZHANG Y

Composition useful as catalysts and electrodes, comprises a nanoporous carbon powder comprising nanopores having disposed in it copper metal nanostructures and an elemental copper nanowires.

NAGEL C J, BRODEUR C L, NAZEL C A J, BRODARD C L

Depositing graphene on a metal surface of substrate by providing substrate including metal surface in reaction chamber, flowing hydrocarbon precursors into reaction chamber and toward the substrate, and generating radicals of hydrogen.

VARADARAJAN B N, NARKEVICIUTE I

Enhancing surface adhesion of polyetherimide for metal plating involves contacting sulfuric acid with polyetherimide substrate surface to form pre-etched substrate, and contacting substrate with sulfuric acid and periodate ions mixture.

NARUSKEVICIUS L, HYMAN M