国家/地区 |
世界知识产权组织(15)![]() |
IPC部 |
C(15)
H(10)
B(2)
|
IPC大类 |
C01(15)
C23(15)
H01(10)
H05(5) |
IPC小类 |
C01B(15)![]() |
IPC |
C23C016/26(15)![]() |
发明人 |
MATSUMOTO T(13)
IFUKU R(9)
WADA M(5)
KABUKI N(4) TAKASHI M(4) RYOTA I(3) SUGIURA M(3) MASAHITO S(2) UEDA H(2) YAMADA H(2) |
公开年 | 2022(6) 2021(3) 2020(2) |
申请年 | 2021(4) 2022(4) 2019(2) |
专利权人 |
TOKYO ELECTRON LTD(15)![]() |
YAMADA H, IFUKU R, MATSUMOTO T, KABUKI N
IFUKU R, MATSUMOTO T, WADA M, KABUKI N
WADA M, IFUKU R, MATSUMOTO T, YAMADA H, TAKASHI M
WADA M, KABUKI N, IFUKU R, MATSUMOTO T
MAKOTO W, TAKASHI M, NOBUTAKE K, RYOTA I, MASAHITO S, HIROKAZU U, MATSUMOTO T, KABURAGI N, IFUKU R, SUGIURA M, UEDA H, WADA M, KABUKI N
IFUKU R, MATSUMOTO T, FUJIO A, SAITO K, RYOTA I, TAKASHI M, AKIRA F, KOUSAKU S