国家/地区 日本(66)
IPC部 C(66)
IPC大类 C01(66) H01(27) B01(20)
B82(13) C08(9) C09(7)
C23(7) B29(3) B32(3)
G01(3) A41(2) B05(2)
C02(2) C04(2) D01(2)
IPC小类 C01B(66)
IPC C01B031/02(43) C01B031/04(30) C01B032/182(28)
B82Y040/00(10) C01B032/184(10) C01B032/15(9)
C01B032/19(9) C01B032/194(9) B01D071/02(8)
B82Y030/00(8) C01B032/18(8) C01B032/198(8)
C01B032/20(7) H01L021/768(7) H01L023/532(7)
发明人 SAKAI T(6) MIYAZAKI H(4) NAITO K(4)
YAMAZAKI Y(4) KAJITA A(3) KATAGIRI M(3)
SAITO T(3) TAKAGI T(3) TOUR J(3)
TOUR J M(3) WADA M(3) ZHANG J(3)
GARCIA S L J(2) GARCIA SAN LUIS J(2) HASEGAWA MASATAKA(2)
公开年 2016(66)
申请年 2015(66)
专利权人 TOSHIBA KK(10) NAT INST ADV.(3) UNIV NAGOYA(3) UNIV RICE WI.(3)
UNIV RICE WI.(3) DAICEL CHEM .(2) JINAN SHENGQ.(2) JINAN SHENGQ.(2)
KOTOBUKI TSU.(2) LG CHEM CO L.(2) LG CHEM LTD(2) REPSOL SA(2)
SEKISUI CHEM.(2) SEMICONDUCTO.(2) TOUR J M(2) UNIV SEOUL N.(2)
UNIV SHINSHU(2)

WADA M, YAMAZAKI Y, MIYAZAKI H, KAJITA A, SAITO T, ISOBAYASHI A, ISHIKURA T, KATAGIRI M, SAKAI T